The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 16, 2025

Filed:

Oct. 06, 2021
Applicant:

Jsw Aktina System Co., Ltd., Yokohama, JP;

Inventor:

Hiroaki Imamura, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); B23K 26/06 (2014.01); B23K 26/073 (2006.01); B23K 101/40 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02678 (2013.01); B23K 26/0643 (2013.01); B23K 26/0648 (2013.01); B23K 26/073 (2013.01); H01L 22/12 (2013.01); B23K 2101/40 (2018.08);
Abstract

A laser irradiation apparatus including: a laser light source configured to emit a linearly polarized pulsed laser light; a first half-wave plate rotatably provided in an optical path of the pulsed laser light; a first polarization beam splitter configured to branch the pulsed laser light from the first half-wave plate into a first pulsed light and a second pulsed light; a second polarization beam splitter configured to combined the first pulsed light with the second pulsed light, the second pulsed light, the second pulsed light being delayed from the first pulsed light by using an optical path length difference between the first pulsed light and the second pulsed light; and a first wave plate rotatably provided in an optical path of a combined pulsed light generated by combining the first pulsed light with the second pulsed light at the second polarization beam splitter.


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