The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 09, 2025

Filed:

Nov. 29, 2021
Applicant:

Microchip Technology Incorporated, Chandler, AZ (US);

Inventor:

Yaojian Leng, Vancouver, WA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10D 84/80 (2025.01); H01L 23/522 (2006.01); H01L 23/532 (2006.01); H10D 1/00 (2025.01); H10D 1/68 (2025.01); H10D 84/01 (2025.01); H01L 21/768 (2006.01); H10D 1/47 (2025.01); H10D 84/00 (2025.01); H10D 86/80 (2025.01);
U.S. Cl.
CPC ...
H10D 84/811 (2025.01); H01L 23/5223 (2013.01); H01L 23/5226 (2013.01); H01L 23/5228 (2013.01); H01L 23/53266 (2013.01); H10D 1/00 (2025.01); H10D 1/696 (2025.01); H10D 84/01 (2025.01); H01L 21/7684 (2013.01); H01L 21/76843 (2013.01); H01L 21/76885 (2013.01); H10D 1/47 (2025.01); H10D 1/68 (2025.01); H10D 1/692 (2025.01); H10D 84/206 (2025.01); H10D 86/80 (2025.01);
Abstract

An integrated circuit structure including a metal-insulator-metal (MIM) capacitor module and a thin-film resistor (TFR) module is provided. The MIM capacitor module includes a bottom electrode base formed in a lower metal layer, a bottom electrode formed in a dielectric region between the lower metal layer and an upper metal layer, an insulator formed over the bottom electrode, and a top electrode formed in the upper metal layer over the insulator. The bottom electrode includes a cup-shaped bottom electrode component and a bottom electrode fill component formed in an interior opening defined by the cup-shaped bottom electrode component. The TFR module includes a pair of metal heads formed in the dielectric region and a resistor element connected across the pair of metal heads. Each metal head includes a cup-shaped head component and a head fill component formed in an interior opening defined by the cup-shaped head component.


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