The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2025
Filed:
Mar. 31, 2023
Ushio Denki Kabushiki Kaisha, Tokyo, JP;
Yusuke Teramoto, Tokyo, JP;
Ushio Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A light source apparatus includes a disk-shaped rotation body, a raw material supply mechanism, a chamber body, and a foil trap. The raw material supply mechanism supplies a front surface of the rotation body with liquid raw material that is irradiated with an energy beam to generate plasma. The chamber body includes a beam introduction section that introduces the energy beam, a radiation extraction section that extracts radiation from the plasma that has been generated, and a plasma generation section that accommodates the rotation body. The foil trap includes a shaft member rotatably disposed in the chamber body and a plurality of foils radially arranged around the shaft member, and the plurality of foils is arranged between the rotation body and the radiation extraction section to capture debris that has been generated from the plasma.