The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2025
Filed:
Jun. 02, 2021
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Gijsbert Hendrik Ronner, Hilversum, NL;
Christianus G. M. De Ridder, Hoogland, NL;
Theodorus G. M. Oosterlaken, Oudewater, NL;
Klaas P. Boonstra, Almere, NL;
Jeroen De Jonge, Almere, NL;
Lucian Jdira, Nieuw Vennep, NL;
Chaggai Shmuel Ganani, Almere, NL;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B65G 47/90 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6719 (2013.01); B65G 47/90 (2013.01);
Abstract
The disclosure relates to a substrate processing apparatus for processing a plurality of substrates. The apparatus comprising a reactor mounted in the apparatus and configured for processing substrates and a reactor mover for moving the reactor for maintenance. The reactor mover is constructed and arranged with a lift to move the reactor to a lower height to allow for access to the reactor by a maintenance worker.