The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2025
Filed:
Apr. 07, 2020
Applicant:
Interpane Entwicklungs—und Beratungsgesellschaft Mbh, Lauenfoerde, DE;
Inventors:
Alexander Polle, Katlenburg, DE;
Dominik Wagner, Hoexter, DE;
Assignee:
INTERPANE ENTWICKLUNGS—UND BERATUNGSGESELLSCHAFT MBH, Lauenfoerde, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/35 (2006.01); C23C 14/54 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3455 (2013.01); C23C 14/35 (2013.01); C23C 14/54 (2013.01); H01J 37/3405 (2013.01); H01J 37/342 (2013.01); H01J 37/3435 (2013.01);
Abstract
A magnetron assembly for magnetron sputtering with rotary cathode systems is provided. The magnetron assembly comprises a plurality of magnets attached to a plurality of yokes and a plurality of driving modules, each comprising an actuating mechanism operatively coupled to at least one of the plurality of yokes. The plurality of driving modules are adapted for adjusting the position of the plurality of yokes individually.