The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2025
Filed:
Oct. 27, 2023
Applied Materials, Inc., Santa Clara, CA (US);
Ashley Okada, San Jose, CA (US);
Ming Xu, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A flow ratio controller (FRC) valve includes a displacement device configured to control fluid flow through the FRC valve, a displacement sensor coupled to the displacement device, and a processing device. The processing device is to: identify an input signal indicative of a first setpoint to preposition the displacement device for a process of a recipe; commence, based on the input signal, adjustment of physical displacement of the displacement device; determine, based on a feedback signal received from the displacement sensor during the adjustment, whether the physical displacement of the displacement device matches the first setpoint; and responsive to determining that the physical displacement of the displacement device matches the first setpoint, stop the adjustment of the physical displacement of the displacement device.