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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12411426 B1

PDFFull Text
Date of Patent:
Sep. 09, 2025

Filed:

Oct. 26, 2022

Substrate holding board, manufacturing method of device, and exposure device

Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Shinji Fukui, Tochigi, JP;

Toshinao Tatsuno, Tochigi, JP;

Hideo Akiba, Tochigi, JP;

Keiji Hirabayashi, Tokyo, JP;

Assignee:

Canon Kabushiki Kaisha, Tokyo, JP;

Attorney:

Canon U.S.A., Inc. IP Division

Primary Examiner:

Peter B Kim

Int. Cl.
CPC ...
G03F 7/00 (2006.01); B32B 9/00 (2006.01); B32B 38/08 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70958 (2013.01); B32B 9/007 (2013.01); B32B 38/08 (2013.01); G03F 7/70316 (2013.01); B32B 2307/40 (2013.01); B32B 2551/08 (2013.01);
Abstract

A substrate holding board includes a first layer and a second layer forming an interfacial surface with the first layer. The first layer and the second layer contain diamond-like carbon. A refractive index of the first layer in a wavelength is higher than a refractive index of the second layer in the wavelength. A distance from the second layer to a topmost surface of the substrate holding board is smaller than a thickness of the first layer.

Find Patent Forward Citations

Fukui, Shinji. (2025). Substrate holding board, manufacturing method of device, and exposure device (U.S. Patent No. 12411426). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12411426

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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