The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 09, 2025

Filed:

Feb. 02, 2023
Applicant:

Fujifilm Corporation, Tokyo, JP;

Inventor:

Keisuke Aoshima, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); B81B 3/00 (2006.01); G02B 26/10 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0858 (2013.01); B81B 3/0045 (2013.01); G02B 26/101 (2013.01); B81B 3/0072 (2013.01); B81B 2201/042 (2013.01); B81B 2203/0154 (2013.01); B81B 2203/058 (2013.01);
Abstract

A micromirror device includes a first support portion that is connected to the mirror portion on a first axis located in a plane including the reflecting surface of the mirror portion in a stationary state, and that swingably supports the mirror portion around the first axis. The first support portion is composed of a main shaft stretched along the first axis and a plurality of sub-shafts symmetrically disposed on both sides of the main shaft across the first axis and stretched along the first axis, the first support portion has a folded structure having three or more folded portions formed by connecting the plurality of sub-shafts, and in a case where inner curvature radii of the folded portions are denoted by R, R, R, . . . , in order from the closest to the first axis, a relationship of 0.73≤R/R≤0.9 (k=1, 2, . . . ) is satisfied.


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