The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 09, 2025

Filed:

Apr. 05, 2023
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Takahiro Masumura, Tochigi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/49 (2006.01);
U.S. Cl.
CPC ...
G01N 21/49 (2013.01);
Abstract

A measuring apparatus is configured to acquire information on a target. The measuring apparatus includes an irradiating unit configured to irradiate a specific area of the target with irradiation light, a detecting unit configured to receive exit light from the target which is caused by irradiating the specific area with the irradiation light, and a processing unit configured to process a signal output from the detecting unit. The processing unit causes the irradiating unit to shape a wavefront of the irradiation light by feeding back a first signal output from the detecting unit that has received the exit light. The processing unit acquires information about the specific area using a second signal output from the detecting unit that has received exit light from the target which is by irradiating the specific area with irradiation light having a shaped wavefront.


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