The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 09, 2025

Filed:

Aug. 24, 2022
Applicant:

Omron Corporation, Kyoto, JP;

Inventors:

Kazuya Kimura, Kyoto, JP;

Masayuki Hayakawa, Kyoto, JP;

Yusuke Nagasaki, Kyoto, JP;

Assignee:

OMRON Corporation, Kyoto, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2022.01); G01B 9/02004 (2022.01); G01B 9/02015 (2022.01); G01B 9/02017 (2022.01); G01B 9/02056 (2022.01); G01B 9/0209 (2022.01); G01B 11/30 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02084 (2013.01); G01B 9/02004 (2013.01); G01B 9/02015 (2013.01); G01B 9/02019 (2013.01); G01B 9/02027 (2013.01); G01B 9/02057 (2013.01); G01B 9/0209 (2013.01); G01B 11/303 (2013.01); G01B 2290/60 (2013.01);
Abstract

A light source projects a light beam. An interferometer includes a splitting unit that splits the light beam. The interferometer generates interference beams with the respective split light beams. Each of the interference beam is generated by interference between a measurement beam radiated toward the measurement target and reflected at the measurement beam and a reference beam passing through an optical path. A light-receiving unit receives the interference beams. A processor calculates a distance to the measurement target by associating at least one detected peak with at least one of the spots in accordance with a mirror surface mode or a rough surface mode. The optical path length difference is made different among the split light beams. In the mirror surface mode, the processor uses a distance calculated based on a peak corresponding to a spot for which the optical path length difference is shortest.


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