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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12410518 B1

PDFFull Text
Date of Patent:
Sep. 09, 2025

Filed:

Apr. 14, 2021

Injector configured for arrangement within a reactor of a vertical furnace and vertical furnace

Applicant:

Asm Ip Holding B.v., Almere, NL;

Inventor:

Christianus G. M. De Ridder, Hoogland, NL;

Assignee:

ASM IP Holding B.V., Almere, NL;

Attorney:

Snell & Wilmer L.L.P.

Primary Examiner:

Charlee J C Bennett

Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/458 (2006.01); F27B 1/10 (2006.01); F27B 5/02 (2006.01); F27B 17/02 (2006.01); F27D 1/00 (2006.01); F27D 1/18 (2006.01); F27D 3/00 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45578 (2013.01); C23C 16/4582 (2013.01); F27B 1/10 (2013.01); F27B 5/02 (2013.01); F27B 17/02 (2013.01); F27D 1/0033 (2013.01); F27D 1/1858 (2013.01); F27D 3/0084 (2013.01); H01L 21/67109 (2013.01); H01L 21/6732 (2013.01);
Abstract

An injector configured for arrangement within a reactor of a vertical furnace to inject gas in the reactor is provided. The injector is made substantial elongated and configured with an internal gas conduction channel to transport gas from a first end of the injector to a second end of the injector. An outer sidewall of the injector may be tapered towards the second end over at least 10%, preferably 30% and most preferably 50% of the length of the injector to increase tolerances for fitting the injector in the tube.

Find Patent Forward Citations

De Ridder, Christianus G. M.. (2025). Injector configured for arrangement within a reactor of a vertical furnace and vertical furnace (U.S. Patent No. 12410518). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12410518

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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