The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 02, 2025

Filed:

Jun. 01, 2022
Applicant:

Fuji Electric Co., Ltd., Kawasaki, JP;

Inventor:

Yasuyuki Hoshi, Matsumoto, JP;

Assignee:

FUJI ELECTRIC CO., LTD., Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 30/66 (2025.01); H01L 21/04 (2006.01); H01L 21/76 (2006.01); H01L 21/761 (2006.01); H10D 12/01 (2025.01); H10D 62/10 (2025.01); H10D 62/17 (2025.01); H10D 62/832 (2025.01);
U.S. Cl.
CPC ...
H10D 62/111 (2025.01); H01L 21/0465 (2013.01); H01L 21/7602 (2013.01); H01L 21/761 (2013.01); H10D 12/031 (2025.01); H10D 30/668 (2025.01); H10D 62/393 (2025.01); H10D 62/8325 (2025.01);
Abstract

P-type low-concentration regions face bottoms of trenches and extend in a longitudinal direction (first direction) of the trenches. The p-type low-concentration regions are adjacent to one another in a latitudinal direction (second direction) of the trenches and connected at predetermined locations by p-type low-concentration connecting portions that are scattered along the first direction and separated from one another by an interval of at least 3 μm. The p-type low-concentration regions and the p-type low-concentration connecting portions have an impurity concentration in a range of 3×10/cmto 9×10/cm. A depth from the bottoms of the trenches to lower surfaces of the p-type low-concentration regions is in a range of 0.7 μm to 1.1 μm. Between the bottom of each of the trenches and a respective one of the p-type low-concentration regions, a p-type high-concentration region is provided. Each p-type high-concentration region has an impurity concentration that is at least 2 times the impurity concentration of the p-type low-concentration regions.


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