The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2025
Filed:
Feb. 20, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Kenneth Brian Doering, San Jose, CA (US);
Gregory J. Wilson, Kalispell, MT (US);
Karthik Ramanathan, Bangalore, IN;
Mario D. Silvetti, Morgan Hill, CA (US);
Kevin Griffin, Livermore, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05B 3/14 (2006.01); C23C 16/455 (2006.01); H05B 3/00 (2006.01); H05B 3/03 (2006.01);
U.S. Cl.
CPC ...
H05B 3/143 (2013.01); C23C 16/45544 (2013.01); H05B 3/0019 (2013.01); H05B 3/03 (2013.01);
Abstract
Heaters having a body with having a top and bottom comprising pyrolytic boron nitride (PBN), a first heater electrode and a second heater electrode are described. The heater electrodes can be enclosed within an electrically insulating standoff and connected to separate busbars to provide power. Heater assemblies including one or more of the heaters and processing chambers including the heater assemblies are also described.