The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2025
Filed:
Jun. 15, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Abdullah Zafar, Santa Clara, CA (US);
Kelvin Chan, San Ramon, CA (US);
Philip Allan Kraus, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/35 (2014.01); H01J 37/32 (2006.01); G01N 21/27 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3299 (2013.01); G01N 21/35 (2013.01); H01J 37/32357 (2013.01); G01N 21/27 (2013.01); G01N 2201/06113 (2013.01); H01J 2237/24585 (2013.01);
Abstract
Embodiments disclosed herein include semiconductor processing tools. In an embodiment, the semiconductor processing tool comprises a plasma source, and a chamber coupled to the plasma source. In an embodiment, a pump is coupled to the chamber. In an embodiment, the semiconductor processing tool further comprises a sampling line. In an embodiment, the sampling line comprises a reaction chamber, and an absorption chamber.