The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2025
Filed:
May. 08, 2023
Applied Materials, Inc., Santa Clara, CA (US);
John Alexander Walder, Beverly, MA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A fastener for securing a faceplate to the chamber walls of an ion source is disclosed. The ion source rests on a source housing having a flange. The fastener includes two straps, which have a cross-section resembling a rounded rectangle. Each strap has two attachment portions and an engagement portion, which rests against an outer surface of the faceplate. The attachment portions pass through openings in the flange and are attached to a tension system that is disposed on the opposite side of the flange. The tension system includes at least one spring associated with each strap to press the faceplate against the tops of the chamber walls. The shape of the straps results in reduced electrostatic stress between the faceplate and the extraction electrode that is located near the faceplate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile