The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2025
Filed:
Dec. 07, 2021
Applicant:
Semes Co., Ltd., Chungcheongnam-do, KR;
Inventors:
Yong Seok Jang, Chungcheongnam-do, KR;
In Kyu Park, Gyeonggi-do, KR;
Assignee:
SEMES CO., LTD., Chungcheongnam-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02J 7/00 (2006.01); G01R 31/36 (2020.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
G01R 31/36 (2013.01); H01J 37/32715 (2013.01); H01J 37/32899 (2013.01); H01J 37/32926 (2013.01); H01L 21/67201 (2013.01); H01L 21/67259 (2013.01); H01L 21/68 (2013.01); H02J 7/0048 (2020.01);
Abstract
The present disclosure provides a control device for charging and auto teaching of a wafer type sensor, a control program executed by the control device, a wafer type sensor storage device, a wafer type sensor charging device, and a semiconductor device manufacturing facility. The control program is a program executed by a control device equipped with a processor, and monitors a semiconductor device manufacturing facility and its part using a wafer type sensor, and monitors the remaining battery level of the wafer type sensor.