The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 02, 2025

Filed:

Feb. 16, 2021
Applicants:

Mitsubishi Heavy Industries, Ltd., Tokyo, JP;

Institute for Laser Technology, Osaka, JP;

Inventors:

Koichi Hamamoto, Tokyo, JP;

Tomoya Morioka, Tokyo, JP;

Shingo Nishikata, Tokyo, JP;

Hiroyuki Daigo, Tokyo, JP;

Noriaki Miyanaga, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 9/02 (2006.01); G02B 5/30 (2006.01); G02B 5/32 (2006.01);
U.S. Cl.
CPC ...
G01J 9/02 (2013.01); G02B 5/3083 (2013.01); G02B 5/32 (2013.01); G01J 2009/0261 (2013.01);
Abstract

A phase difference measuring device is provided with a phase conversion device and a detection device. The phase conversion device converts a first laser beam that passes therethrough so that the first laser beam includes a phase distribution of one cycle in an azimuth direction in a cross section of the first laser beam included in an arbitrary virtual plane perpendicular to an optical axis of the first laser beam. The detection device detects an azimuth angle of an intensity centroid of an interference pattern generated by at least a part of a first laser beam that has passed through the phase conversion device, and a part of a second laser beam that derives from a laser beam as seed light from which the first laser beam derives, of which an optical intensity is same as the at least a part of the first laser beam, and detects an inter-beam phase difference of the second laser beam.


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