The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2025
Filed:
Sep. 18, 2024
Applicant:
Ksm Component Co., Ltd., Gimpo-si, KR;
Inventors:
Yun Ho Kim, Gimpo-si, KR;
Joo Hwan Kim, Gimpo-si, KR;
Hwan Young Park, Gimpo-si, KR;
Bo Sung Kim, Gimpo-si, KR;
Hyun Taek Lee, Gimpo-si, KR;
Assignee:
KSM COMPONENT CO., LTD., Gimpo-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C04B 35/103 (2006.01); C04B 35/638 (2006.01); C04B 35/64 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
C04B 35/103 (2013.01); C04B 35/638 (2013.01); C04B 35/64 (2013.01); H01L 21/68757 (2013.01); C04B 2235/3206 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3865 (2013.01); C04B 2235/425 (2013.01); C04B 2235/602 (2013.01);
Abstract
A ceramic susceptor particularly with excellent volumetric resistance at high temperatures and thermal conductivity at room temperature compared to a typical ceramic susceptor and a method for manufacturing the same are disclosed. The ceramic susceptor is characterized by comprising alumina (Al2O3); and aluminum nitride (AlN), and not comprising a secondary phase including an aluminum oxynitride phase (AlON phase).