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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12404215 B1

PDFFull Text
Date of Patent:
Sep. 02, 2025

Filed:

Sep. 18, 2024

Ceramic susceptor and manufacturing method thereof

Applicant:

Ksm Component Co., Ltd., Gimpo-si, KR;

Inventors:

Yun Ho Kim, Gimpo-si, KR;

Joo Hwan Kim, Gimpo-si, KR;

Hwan Young Park, Gimpo-si, KR;

Bo Sung Kim, Gimpo-si, KR;

Hyun Taek Lee, Gimpo-si, KR;

Assignee:

KSM COMPONENT CO., LTD., Gimpo-si, KR;

Attorney:

Sughrue Mion, PLLC

Primary Examiner:

Amber R Orlando

Assistant Examiner:

Cameron K Miller

Int. Cl.
CPC ...
C04B 35/103 (2006.01); C04B 35/638 (2006.01); C04B 35/64 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
C04B 35/103 (2013.01); C04B 35/638 (2013.01); C04B 35/64 (2013.01); H01L 21/68757 (2013.01); C04B 2235/3206 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3865 (2013.01); C04B 2235/425 (2013.01); C04B 2235/602 (2013.01);
Abstract

A ceramic susceptor particularly with excellent volumetric resistance at high temperatures and thermal conductivity at room temperature compared to a typical ceramic susceptor and a method for manufacturing the same are disclosed. The ceramic susceptor is characterized by comprising alumina (Al2O3); and aluminum nitride (AlN), and not comprising a secondary phase including an aluminum oxynitride phase (AlON phase).

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Quick Actions:

Kim, Yun. (2025). Ceramic susceptor and manufacturing method thereof (U.S. Patent No. 12404215). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12404215

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