Inkjet printhead and method of manufacturing the same

Abstract

Disclosed are an inkjet printhead and a method of manufacturing the same, the inkjet printhead including: a first layer including an inlet formed to penetrate a substrate and introduce ink therein, and a plurality of membranes; a second layer disposed beneath the first layer, and including a manifold formed to penetrate a substrate and communicate with the inlet or recessed on a top of the substrate, and a plurality of nozzle channels formed to penetrate the substrate below the membrane and allow the ink transferred from the manifold to flow therein; a third layer disposed beneath the second layer, and including a plurality of nozzles formed in a substrate and communicating the plurality of nozzle channels; a piezoelectric actuator formed on the first layer formed with the membrane, and including a lower first electrode, a piezoelectric body on the first electrode, and a second electrode on the piezoelectric body; a first voltage controller configured to oscillate the membrane by applying a pulse voltage to the first electrode and the second electrode; a third electrode disposed beneath the third layer, formed around each nozzle, and surrounded with an insulator; and a second voltage controller configured to discharge droplets of the ink based on induced electric force by applying voltage to the third electrode.