The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 02, 2025

Filed:

Feb. 18, 2020
Applicant:

Kurita Water Industries Ltd., Tokyo, JP;

Inventors:

Wataru Sugita, Tokyo, JP;

Yuichi Ogawa, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01F 35/22 (2022.01); B01F 23/40 (2022.01); B01F 25/00 (2022.01); B01F 35/21 (2022.01); B01F 35/71 (2022.01); B01F 101/58 (2022.01); C11D 7/04 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B01F 35/2202 (2022.01); B01F 23/49 (2022.01); B01F 25/00 (2022.01); B01F 35/2133 (2022.01); B01F 35/717613 (2022.01); C11D 7/04 (2013.01); H01L 21/67051 (2013.01); B01F 2101/58 (2022.01); C11D 2111/22 (2024.01);
Abstract

Dilute chemical solution production device () has a plunger pump and a chemical solution supply pipe () that supply a chemical solution S from a chemical solution reservoir. The end of the chemical solution supply pipe () serves as an injection pointfor the chemical solution (S). The chemical solution supply pipe () is inserted to an approximately central position in the radial direction of an ultrapure water passage (), which is a first pipe, via a bore-through joint (). Conductivity meter () as a conductivity measuring meter is provided on the downstream side of the bore-through joint (), which serves as the injection point (), and is connected to a controller so that the plunger pump () can be controlled in accordance with the measured value of the conductivity meter ().


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