The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2025
Filed:
Sep. 28, 2022
Sandisk Technologies Llc, Addison, TX (US);
Sandisk Technologies, Inc., Milpitas, CA (US);
Abstract
A method of forming a three-dimensional semiconductor device includes forming an alternating stack of insulating layers and spacer material layers over a substrate, forming memory openings formed in the memory array region and monitor openings formed in a monitor region though the alternating stack, forming memory opening fill structures in the memory openings, forming monitor opening fill structures by depositing a monitor opening fill material in the monitor openings, recessing first portions of the alternating stack in a contact region and second portions of the alternating stack in the monitor region, and determining at least one characteristic of the recessed surfaces of the monitor opening fill structures. At least one characteristic of the memory openings or memory opening fill structures may be determined based on the determining at least one characteristic of the recessed surfaces of the monitor opening fill structures.