The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2025
Filed:
Apr. 19, 2023
Applied Materials, Inc., Santa Clara, CA (US);
Shreyansh P. Patel, Gloucester, MA (US);
Graham Wright, Newburyport, MA (US);
Daniel Alvarado, Methuen, MA (US);
Daniel R. Tieger, Manchester, MA (US);
Brian S. Gori, Gloucester, MA (US);
William R. Bogiages, Jr., Gloucester, MA (US);
Benjamin Oswald, Gloucester, MA (US);
Craig R. Chaney, Gloucester, MA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An ion source with a target holder for holding a solid dopant material is disclosed. The ion source comprises a thermocouple disposed proximate the target holder to monitor the temperature of the solid dopant material. In certain embodiments, a controller uses this temperature information to vary one or more parameters of the ion source, such as arc voltage, cathode bias voltage, extracted beam current, or the position of the target holder within the arc chamber. Various embodiments showing the connections between the controller and the thermocouple are shown. Further, embodiments showing various placement of the thermocouple on the target holder are also presented.