The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 26, 2025

Filed:

Feb. 24, 2021
Applicant:

Watlow Electric Manufacturing Company, St. Louis, MO (US);

Inventors:

Stanton H. Breitlow, Winona, MN (US);

Matthew Yender, St. Louis, MO (US);

Brittany Phillips, St. Louis, MO (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G05D 23/19 (2006.01); G05D 23/24 (2006.01);
U.S. Cl.
CPC ...
G05D 23/2401 (2013.01); G05D 23/1934 (2013.01);
Abstract

A method of dynamically calibrating a heater having a plurality of zones defined by one or more resistive heating elements includes controlling power to a heater having a plurality of zones based on a dynamic resistance-temperature (R-T) model to control a temperature of the heater to a temperature setpoint. For each of the plurality of zones, the method further includes measuring a temperature of a respective zone based on a resistance of the resistive heating elements of the respective zone and the dynamic R-T model, measuring a reference temperature for the respective zone, and incrementally adjusting a resistance value associated with the temperature setpoint provided in the dynamic R-T model for the respective zone to a calibrated resistance value. The method further includes providing the dynamic R-T model that correlates the calibrated resistance values of the plurality of zones with the temperature setpoint as a calibrated R-T model.


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