The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2025
Filed:
Jan. 18, 2024
Horiba Stec, Co., Ltd., Kyoto, JP;
Patrick Lowery, Reno, NV (US);
Maximilian Martin Gundlach, Reno, NV (US);
Tadahiro Yasuda, Kyoto, JP;
Andrew Price, Reno, NV (US);
HORIBA STEC, Co., Ltd., Kyoto, JP;
Abstract
A flow ratio controller system includes an inlet receiving a total inlet fluid flow from one or more inlet channels, distribution channels fluidically connected to the inlet and arranged in parallel in a branching flow path downstream of the inlet, and a controller. The distribution channels includes a hybrid distribution channel. The controller selectively operates in alternative control modes including a flow verification control mode and a flow ratio control mode. In the flow verification control mode, the controller calculates a calibrated value for a reference volume using measurements from a mass flow meter in the hybrid distribution channel, then calculates a target channel calibration value for the mass flow meter in the target distribution channel. In the flow ratio control mode, the controller controls each of the distribution channels, including the hybrid channel, according to a respective flow ratio setpoint for each distribution channel.