The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2025
Filed:
Oct. 26, 2022
Horiba Stec, Co., Ltd., Kyoto, JP;
Hidetaka Yada, Kyoto, JP;
Yuichiro Asaumi, Kyoto, JP;
HORIBA STEC, Co., Ltd., Kyoto, JP;
Abstract
A vaporization device is provided with a control valve on a flow path along which flows a liquid material, a vaporizing portion in which the liquid material is vaporized by decompression or heating, a liquid flow rate sensor that measures a flow rate of a liquid material flowing along the flow path, and a valve controller that controls the control valve using PI control or PID control that is based on a set value showing a set flow rate and on a measurement value of the flow rate that is measured by the liquid flow rate sensor. The vaporization device is configured to, during a transient response period of the flow rate that is measured by the liquid flow rate sensor, switch the integral gain set in the valve controller from a reference integral gain to a corrected integral gain that is different from the reference integral gain.