The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 26, 2025

Filed:

Apr. 28, 2023
Applicant:

Ushio Denki Kabushiki Kaisha, Tokyo, JP;

Inventors:

Noritaka Ashizawa, Tokyo, JP;

Hironobu Yabuta, Tokyo, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70916 (2013.01); G03F 7/70033 (2013.01); G03F 7/70025 (2013.01);
Abstract

A debris mitigation device includes a static foil trap. The static foil trap includes an enclosure section, a plurality of foils, an inlet hole, and a pressure-increasing mechanism. The enclosure section includes an incident opening where light emitted from the light source enters, an emission opening where the light is emitted, and an internal space where the light travels. The foils are fixed in an area of the internal space. The inlet hole is configured to be communicated with the internal space, and allow a transparent gas transparent to the light to flow into the internal space. The pressure-increasing mechanism includes at least one of an incident-side member and an emission-side member disposed at the incident opening and the emission opening, respectively, in a manner that opening areas thereof are reduced without blocking a traveling of the light, and increases a pressure of the internal space.


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