The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2025
Filed:
Oct. 27, 2022
Sensirion Ag, Stäfa, CH;
Sensirion AG, Stäfa, CH;
Abstract
An optical component () can include a chip comprising a carrier substrate () made of a semiconductor material and a membrane () disposed on a planar membrane-carrying surface of the carrier substrate (). The membrane () is formed integrally with the carrier substrate (). A cavity () is formed in the carrier substrate (), the cavity having a first end and a second end. The membrane () has a cavity-spanning portion that spans the cavity () at its first end. The cavity-spanning portion of the membrane () is transparent to light in a desired wavelength range. An optical element () for shaping, diffusing, or filtering the light is formed on or in the cavity-spanning portion of the membrane (). The optical component () may be manufactured in a wafer-level process. Also disclosed is an optoelectronic module that includes the optical component () together with an optoelectronic device.