The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 26, 2025

Filed:

Jun. 10, 2022
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Sunwoo Kim, Ansan-si, KR;

Minseob Kim, Suwon-si, KR;

Juhyun Kim, Yongin-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2884 (2013.01); H01L 22/34 (2013.01);
Abstract

A test device includes semiconductor substrate, gate lines disposed on an upper surface of the semiconductor substrate and extending in a first direction parallel to the upper surface, a test element group including test transistors defined by the gate lines and by active regions extending in a second direction perpendicular to the first direction and intersecting the gate lines, and metal wirings disposed on the semiconductor substrate and electrically connected to the active regions and/or the gate lines, and a test circuit electrically connected to the metal wirings and configured to measure resistance of the test transistors. The gate lines include first gate lines and second gate lines disposed alternately, with the spacing between first gate lines and second gate lines alternating between a first distance and a second distance greater than the first distance.


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