The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2025
Filed:
Dec. 21, 2022
Infineon Technologies Ag, Neubiberg, DE;
Rainer Markus Schaller, Saal a.d. Donau, DE;
Jochen Dangelmaier, Beratzhausen, DE;
Matthias Eberl, Taufkirchen, DE;
Simon Gassner, Munich, DE;
Franz Jost, Stuttgart, DE;
Stefan Kolb, Unterschleissheim, DE;
Horst Theuss, Wenzenbach, DE;
Infineon Technologies AG, Neubiberg, DE;
Abstract
A photoacoustic sensor includes a first MEMS device and a second MEMS device. The first MEMS device includes a first MEMS component including an optical emitter, and a first optically transparent cover wafer-bonded to the first MEMS component, wherein the first MEMS component and the first optically transparent cover form a first closed cavity. The second MEMS device includes a second MEMS component including a pressure detector, and a second optically transparent cover wafer-bonded to the second MEMS component, wherein the second MEMS component and the second optically transparent cover form a second closed cavity.