The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 26, 2025

Filed:

Jul. 08, 2021
Applicants:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Kioxia Corporation, Tokyo, JP;

Tohoku University, Sendai, JP;

Inventors:

Kenya Uchida, Yokohama, JP;

Hiroyuki Fukui, Yokkaichi, JP;

Ikuo Uematsu, Yokohama, JP;

Takeaki Iwamoto, Sendai, JP;

Eunsang Kwon, Sendai, JP;

Assignees:

KABUSHIKI KAISHA TOSHIBA, Tokyo, JP;

Kioxia Corporation, Tokyo, JP;

TOHOKU UNIVERSITY, Sendai, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/3563 (2014.01); C01B 33/107 (2006.01); G01N 21/65 (2006.01); G01N 24/08 (2006.01); C30B 25/02 (2006.01);
U.S. Cl.
CPC ...
G01N 21/3563 (2013.01); C01B 33/107 (2013.01); G01N 21/65 (2013.01); G01N 24/088 (2013.01); C30B 25/02 (2013.01); G01N 2201/06113 (2013.01);
Abstract

According to one embodiment, a determination method is provided. The determination method determines progress of a treatment of a side-product produced in a process of reacting a substance containing a halogen and silicon or reacting a substance containing silicon and a substance containing a halogen. The treatment of the side-product includes bringing the side-product into contact with a treatment fluid containing water to obtain a first solid matter. The determination method includes determining the progress of the treatment of the side-product based on a signal according to a chemical analysis of at least one of an Si-α bond (α is at least one selected from the group consisting of F, Cl, Br, and I) and an Si—H bond, of the first solid matter.


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