The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2025
Filed:
Jun. 28, 2022
Applicant:
Sintokogio, Ltd., Nagoya, JP;
Inventors:
Assignee:
SINTOKOGIO, LTD., Aichi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 1/22 (2006.01); G01G 3/14 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
G01L 1/2293 (2013.01); H01L 21/0274 (2013.01); G01G 3/1402 (2013.01);
Abstract
A method for producing a force sensor is a method for producing a force sensor that includes a plate-shaped member (base material) and a strain gauge made of a conductor film, the method including: a first step (see (c)) of forming a conductor layer on one of main surfaces of the plate-shaped member (base material) via a dielectric layer; and a second step (see (d)) of processing the conductor film into the strain gauges by a semiconductor transfer production method.