The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2025
Filed:
Jul. 03, 2020
Applicant:
Oerlikon Surface Solutions Ag, Pfäffikon, Pfäffikon SZ, CH;
Inventors:
Assignee:
OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON, Pfäffikon SZ, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C23C 14/00 (2006.01); C23C 14/06 (2006.01); C23C 14/32 (2006.01); C23C 14/35 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3407 (2013.01); C23C 14/0021 (2013.01); C23C 14/0641 (2013.01); C23C 14/325 (2013.01); C23C 14/351 (2013.01); H01J 37/32055 (2013.01); H01J 37/34 (2013.01); H01J 37/345 (2013.01);
Abstract
A cathodic arc evaporation apparatus including