The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 26, 2025

Filed:

Nov. 02, 2020
Applicant:

Kawasaki Jukogyo Kabushiki Kaisha, Kobe, JP;

Inventors:

Haruhiko Tan, Kobe, JP;

Masaya Yoshida, Himeji, JP;

Masahiko Sumitomo, Kakogawa, JP;

Shota Tominaga, Akashi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); B25J 9/04 (2006.01); B25J 15/00 (2006.01); B25J 19/02 (2006.01); B65G 47/90 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B65G 47/905 (2013.01); B25J 9/042 (2013.01); B25J 15/0014 (2013.01); B25J 19/02 (2013.01); H01L 21/67259 (2013.01); H01L 21/68707 (2013.01);
Abstract

A substrate conveying robot includes a hand sensor provided on a substrate holding hand, and a hand circuit substrate provided on the substrate holding hand and connected to the hand sensor, and a serial communication connection is made between a robot controller and the hand circuit substrate through an inside of an arm.


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