The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2025
Filed:
Jul. 20, 2022
Surface treatment method, manufacturing method for product, surface treatment apparatus, and product
Canon Kabushiki Kaisha, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A product includes a fine periodic structure having a plurality of projection portions extending parallel to each other in a first direction in each of a first region and a second region adjacent in the first direction on a surface of a substrate. The fine periodic structure formed in an inner portion of the first region and the fine periodic structure formed in an inner portion of the second region are substantially the same periodic structures. End portions of the plurality of projection portions formed in the first region and end portions of the plurality of projection portions formed in the second region are formed in a boundary portion between the first region and the second region.