The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 19, 2025

Filed:

Aug. 22, 2022
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Juyoun Kim, Suwon-si, KR;

Sangjung Kang, Suwon-si, KR;

Jinwoo Kim, Hwaseong-si, KR;

Yoori Sung, Hwaseong-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 64/66 (2025.01); H01L 21/28 (2025.01); H10D 62/13 (2025.01); H10D 64/27 (2025.01); H10D 64/68 (2025.01); H10D 84/01 (2025.01); H10D 84/03 (2025.01);
U.S. Cl.
CPC ...
H10D 64/667 (2025.01); H01L 21/28026 (2013.01); H10D 62/151 (2025.01); H10D 64/411 (2025.01); H10D 64/691 (2025.01); H10D 84/0142 (2025.01); H10D 84/038 (2025.01);
Abstract

A semiconductor device includes a substrate including PMOSFET and NMOSFET regions; and first/second transistors on the PMOSFET/NMOSFET regions, respectively, wherein the first transistor includes a first gate dielectric layer on the substrate; a first lower metal pattern on the first gate dielectric layer; a second lower metal pattern on the first lower metal pattern; and a first intermediate pattern between the first and second lower metal patterns, the second transistor includes a second gate dielectric layer on the substrate; a third lower metal pattern on the second gate dielectric layer; and a second intermediate pattern between the second gate dielectric layer and the third lower metal pattern, the first and second intermediate patterns each include lanthanum, the first to third lower metal patterns each include a metal nitride, and a thickness of the first lower metal pattern is greater than a thickness of the third lower metal pattern.


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