The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2025
Filed:
Nov. 24, 2021
Seiko Epson Corporation, Tokyo, JP;
Noboru Itomi, Nirasaki, JP;
SEIKO EPSON CORPORATION, , JP;
Abstract
A vibration device includes a base including a semiconductor substrate and a through electrode passing through the portion between a first surface and a second surface of the semiconductor substrate, a vibrator placed at the side facing the first surface, and an external connection terminal provided at the side facing the second surface via an insulating layer. An oscillation circuit that is electrically coupled to the vibrator via the through electrode and generates an oscillation signal by causing the vibrator to oscillate, and an output buffer circuit that outputs a clock signal based on the oscillation signal are placed at the second surface. The clock signal from the output buffer circuit is outputted via the external connection terminal. The through electrode and the external connection terminal are arranged so as not to overlap with each other in a plan view viewed in the direction perpendicular to the first surface.