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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12394654 B1

PDFFull Text
Date of Patent:
Aug. 19, 2025

Filed:

Dec. 14, 2022

Wafer type sensor, wafer alignment method using the same, and calibration device for calibrating wafer type sensor

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Byung Hoon Ko, Suwon-si, KR;

Seung Woo Noh, Suwon-si, KR;

Sang Yun Park, Suwon-si, KR;

Jin Woo Choi, Suwon-si, KR;

Youn Ho Kim, Suwon-si, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;

Attorney:

Sughrue Mion, PLLC

Primary Examiner:

Michelle M Iacoletti

Assistant Examiner:

Judy Dao Tran

Int. Cl.
CPC ...
H01L 21/68 (2006.01); G01B 11/14 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); G01B 7/14 (2006.01); G12B 9/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68 (2013.01); G01B 11/14 (2013.01); H01L 21/67259 (2013.01); H01L 21/68707 (2013.01); G01B 7/14 (2013.01); G12B 9/02 (2013.01);
Abstract

A wafer-type sensor for wafer alignment includes a dummy wafer; a sensor module disposed in the dummy wafer, and a processor configured to control the sensor module to measure a distance between a side surface of the dummy wafer and a ring formed around a periphery of an electrostatic chuck based on the dummy wafer being mounted on the electrostatic chuck by a transfer robot.

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Ko, Byung. (2025). Wafer type sensor, wafer alignment method using the same, and calibration device for calibrating wafer type sensor (U.S. Patent No. 12394654). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12394654

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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