The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2025
Filed:
Sep. 11, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Quoc Truong, San Ramon, CA (US);
Dmitry A. Dzilno, Sunnyvale, CA (US);
Robert B. Moore, Bigfork, MT (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); C23C 16/00 (2006.01); C23C 16/455 (2006.01); H01J 37/32 (2006.01); H01L 21/02 (2006.01); H05H 1/36 (2006.01); H05H 1/34 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32541 (2013.01); C23C 16/45536 (2013.01); H01J 37/32091 (2013.01); H01J 37/32532 (2013.01); H01J 37/3255 (2013.01); H01L 21/0228 (2013.01); H05H 1/36 (2013.01); H05H 1/3431 (2021.05);
Abstract
A plasma source assembly for use with a substrate processing chamber is described. The assembly includes a spring which is disposed between electrodes and a dielectric ring.