The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2025
Filed:
Nov. 28, 2023
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Sunil Kapoor, Vancouver, WA (US);
Thomas Frederick, West Linn, OR (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); C23C 16/455 (2006.01); C23C 16/505 (2006.01); C23C 16/52 (2006.01); G01N 21/95 (2006.01); G01R 13/02 (2006.01); G01R 19/00 (2006.01); G01R 27/26 (2006.01); H01J 37/32 (2006.01); H01L 23/64 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32155 (2013.01); C23C 16/45536 (2013.01); C23C 16/505 (2013.01); C23C 16/52 (2013.01); G01N 21/9501 (2013.01); G01R 13/02 (2013.01); G01R 19/0084 (2013.01); G01R 27/2605 (2013.01); H01J 37/32091 (2013.01); H01J 37/32183 (2013.01); H01J 37/32899 (2013.01); H01J 37/3299 (2013.01); H01L 21/67253 (2013.01); H01L 23/642 (2013.01); H01J 2237/327 (2013.01); H01L 21/67028 (2013.01); H01L 21/67069 (2013.01); H01L 2223/6655 (2013.01);
Abstract
Methods and apparatus for measuring capacitance are disclosed.