The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 19, 2025

Filed:

Sep. 04, 2020
Applicant:

Soitec, Bernin, FR;

Inventors:

Sylvain Ballandras, Besançon, FR;

Emilie Courjon, Franois, FR;

Florent Bernard, Besançon, FR;

Thierry Laroche, Besançon, FR;

Julien Garcia, Chamblay, FR;

Assignee:

Soitec, Bernin, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 29/22 (2006.01); G01K 11/26 (2006.01); G01N 29/02 (2006.01); G01N 29/24 (2006.01); H03H 9/02 (2006.01); H03H 9/145 (2006.01); H03H 9/25 (2006.01);
U.S. Cl.
CPC ...
G01N 29/222 (2013.01); G01K 11/265 (2013.01); G01N 29/022 (2013.01); G01N 29/2462 (2013.01); H03H 9/02551 (2013.01); H03H 9/02559 (2013.01); H03H 9/02574 (2013.01); H03H 9/02842 (2013.01); H03H 9/145 (2013.01); H03H 9/25 (2013.01); G01N 2291/0256 (2013.01); G01N 2291/0423 (2013.01); G01N 2291/101 (2013.01);
Abstract

An acoustic wave sensor device, comprising an interdigitated transducer; a first reflection structure arranged on one side of the interdigitated transducer, and a second reflection structure arranged on another side of the interdigitated transducer; a first resonance cavity comprising a first upper surface and formed between the interdigitated transducer and the first reflection structure; a second resonance cavity comprising a second upper surface and formed between the interdigitated transducer and the second reflection structure; and wherein the second upper surface comprises a physical and/or chemical modification as compared to the first upper surface.


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