The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 19, 2025

Filed:

Jan. 21, 2021
Applicant:

Murata Machinery, Ltd., Kyoto, JP;

Inventors:

Tatsuo Tsubaki, Ise, JP;

Hiroyuki Yokoyama, Ise, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 5/28 (2006.01); G01B 5/00 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
G01B 5/28 (2013.01); G01B 5/0007 (2013.01); H01L 21/67288 (2013.01); H01L 21/67769 (2013.01);
Abstract

A flatness measurement unit is a flatness measurement unit to be placed on a shelf for measuring flatness relating to the degree of deviation from a state in which four predetermined points on the shelf are present on the same plane. The flatness measurement unit includes: a body frame; and four contact sections dispersedly disposed on the body frame and provided so as to be in contact with the respective four predetermined points on the shelf. The four contact sections include two first contact sections not located diagonally and two second contact sections other than the first contact sections. The center of gravity of the flatness measurement unit is positioned in an area containing the two first contact sections, among four areas defined by two diagonal lines each passing through the corresponding first contact section and the corresponding second contact section that are located diagonally.


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