The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2025
Filed:
Nov. 27, 2020
Edwards Japan Limited, Yachiyo, JP;
Edwards Japan Limited, Yachiyo, JP;
Abstract
A vacuum exhaust apparatus capable of accurately and rapidly adjusting the pressure in an exhaust chamber and a vacuum pump used therein are provided. A vacuum pump includes a rotor that rotates to exhaust an exhaust chamber and a casing having an inlet port. A valve is located between the inlet port of the vacuum pump and an outlet port of the exhaust chamber. A controller performs control such that the pressure in the exhaust chamber matches a target value. The controller adjusts the opening degree of the valve when the absolute value of the difference between the pressure in the exhaust chamber and the target value is greater than a predetermined value, and adjusts the rotational speed of the rotor of the vacuum pump when the absolute value of the difference between the pressure in the exhaust chamber and the target value is less than the predetermined value.