The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2025
Filed:
Apr. 09, 2021
Tasmit, Inc., Yokohama, JP;
Yuji Miura, Yokohama, JP;
TASMIT, INC., Yokohama, JP;
Abstract
The method includes: determine a first integrated value by integrating measured values of widths of reference patterns (A) belonging to a first group; determine a second integrated value by integrating measured values of widths of reference patterns (B) belonging to a second group; performing second matching between patterns on an image of a second region and corresponding CAD patterns; determining a third integrated value by integrating measured values of widths of patterns (A) belonging to a first group; determining a fourth integrated value by integrating measured values of widths of patterns (B) belonging to a second group; and determining that the second matching has been performed correctly when the magnitude relationship between the third integrated value and the fourth integrated value coincides with the magnitude relationship between the first integrated value and the second integrated value.