The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 12, 2025

Filed:

Aug. 25, 2022
Applicant:

Mitsui Chemicals, Inc., Tokyo, JP;

Inventor:

Yosuke Ono, Sodegaura, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/62 (2012.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 1/62 (2013.01); G03F 7/7015 (2013.01);
Abstract

Provided is a pellicle film, which includes plural carbon nanotubes, in which an average value of linearity parameters represented by the following Formula (1) of the plurality of carbon nanotubes is 0.10 or less:linearity parameter=standard deviationof a width of single tube/average valueof the width  Formula (1):


Find Patent Forward Citations

Ono, Yosuke. (2025). Pellicle film, pellicle, exposure original plate, exposure device, and method for manufacturing pellicle film (U.S. Patent No. 12386252). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12386252

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…