The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2025
Filed:
Sep. 22, 2023
Applied Materials, Inc., Santa Clara, CA (US);
Pengyu Han, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An optical reflectometry system, including a processing chamber, a substrate support wherein the substrate support is configured to accept a substrate, a light source configured to transmit an incident light beam, an optical fiber bundle coupled to the light source and optically coupled to a lens assembly, wherein the lens assembly optically coupled to at least a first optical fiber, and configured to transmit to, and receive from, at least one area of the substrate through the transparent window, an optical splitter disposed within the optical fiber bundle; a return fiber bundle coupled to the optical splitter, and coupled to a detection system, wherein the detection system is configured to reference a reference light beam to a reflected light beam to improve a signal-to-noise ratio, analyze a full spectrum of the reflected light beam, and determine at least one characteristic of the at least one area of the substrate.