The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 12, 2025

Filed:

Dec. 26, 2018
Applicants:

National University Corporation Ehime University, Matsuyama, JP;

Growth Co., Ltd., Osaka, JP;

Inventors:

Hiromichi Toyota, Matsuyama, JP;

Shinfuku Nomura, Matsuyama, JP;

Toshiyuki Shimada, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/27 (2006.01); C23C 16/513 (2006.01); C30B 25/02 (2006.01); C30B 29/04 (2006.01); H01L 21/02 (2006.01); H05H 1/24 (2006.01); H10D 62/83 (2025.01);
U.S. Cl.
CPC ...
C23C 16/276 (2013.01); C23C 16/513 (2013.01); C30B 25/02 (2013.01); C30B 29/04 (2013.01); H01L 21/02527 (2013.01); H01L 21/0262 (2013.01); H05H 1/247 (2021.05); H10D 62/8303 (2025.01);
Abstract

According to an embodiment of the present invention, there is provided a device for forming at least a diamond film on a surface of a substrate, the device comprising: a container configured to hold a raw material liquid and to place the substrate in the raw material liquid; an electrode part comprising a positive electrode and a negative electrode and configured to generate a plasma in the raw material liquid; a raw material gas supply part and a carrier gas supply part, each of the raw material gas supply part and the carrier gas supply part being connected to the electrode part; and a power source configured to apply a voltage to the electrode part, wherein the power source is a direct current power source, and the electrode part further comprises an adjunctive member, and the adjunctive member is attached to an electrode at a plasma generation region of the electrode part.


Find Patent Forward Citations

Loading…