The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2025
Filed:
Dec. 09, 2020
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Abstract
According to the present invention, a yttrium-fluoride-based sprayed coating that has a Vickers hardness of 350 or higher, includes a YFcrystal phase having an orthorhombic crystal system, and does not include a YFcrystal phase having a crystal system other than an orthorhombic crystal system is produced by plasma-spraying a spray powder that includes a YFcrystal phase having an orthorhombic crystal system and does not include a YFcrystal phase having a crystal system other than an orthorhombic crystal system. In the present invention, it is possible to provide a yttrium-fluoride-based sprayed coating that has a high coating hardness and is such that the amount of particles generated upon exposure to a halogen-based gas plasma is low, and such a sprayed coating is exceptional as a sprayed coating formed on a member for a semiconductor-producing device that is used in a semiconductor production step.