The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2025
Filed:
Feb. 15, 2023
Samsung Display Co., Ltd., Yongin-si, KR;
Dongwoo Fine-chem Co., Ltd., Iksan-si, KR;
Shinhyuk Yang, Yongin-si, KR;
Beomsoo Kim, Iksan-si, KR;
Hyeonsu Cho, Iksan-si, KR;
Yujin Kim, Yongin-si, KR;
Jeehoon Kim, Yongin-si, KR;
Youngjin Yoon, Iksan-si, KR;
Eunwon Lee, Iksan-si, KR;
Donghan Kang, Yongin-si, KR;
Samsung Display Co., Ltd., Yongin-si, KR;
DONGWOO FINE-CHEM Co., Ltd., Iksan-si, KR;
Abstract
An etchant including: persulfate; a fluorine-containing compound; a chlorine-containing compound; a cyclic amine compound; an inorganic acid; sulfate; and water, wherein a tip control index (Y) of the etchant is a value of at least about 45.0 and not more than about 70.0, the tip control index (Y) being a value calculated by Equation 1:=1.0×10(1)+1.0×10(2)+5.0×10(3)+1.5×(1)×(2)+2.0×10(1)×(3)+2.0×10(2)×(3) Equation 1The description of Equation 1 is as in the specification.