The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 12, 2025

Filed:

Oct. 25, 2017
Applicant:

Nikon Corporation, Tokyo, JP;

Inventors:

Masayuki Shiraishi, Kumagaya, JP;

Shigeki Egami, Tokyo, JP;

Yoshio Kawabe, Kumagaya, JP;

Yosuke Tatsuzaki, Kumagaya, JP;

Yuichi Shibazaki, Kumagaya, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/361 (2014.01); B23K 26/06 (2014.01); B23K 26/08 (2014.01); B23K 26/082 (2014.01); B23K 26/70 (2014.01); B64C 1/06 (2006.01); B64C 21/10 (2006.01);
U.S. Cl.
CPC ...
B23K 26/361 (2015.10); B23K 26/08 (2013.01); B23K 26/082 (2015.10); B23K 26/083 (2013.01); B23K 26/0869 (2013.01); B23K 26/702 (2015.10); B23K 26/0643 (2013.01); B23K 26/0648 (2013.01); B64C 1/061 (2013.01); B64C 21/10 (2013.01);
Abstract

A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; a first position change apparatus that changes a position of at least one of the object and an irradiation area that is formed on the surface of the object by the light irradiation apparatus; and a control apparatus that controls the first position change apparatus to form a structure for reducing a frictional resistance of the surface of the object to a fluid by irradiating the surface of the object with the processing light while changing the position of at least one of the irradiation area and the object to change a thickness of a part of the object.


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