The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2025
Filed:
Dec. 22, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Alexander Sulyman, San Francisco, CA (US);
Phillip Alfred Criminale, Liberty Hill, TX (US);
Cory Bowdach, San Jose, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); H01L 21/683 (2006.01); H02K 11/22 (2016.01); H02K 41/03 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68742 (2013.01); H01L 21/6833 (2013.01); H02K 11/22 (2016.01); H02K 41/031 (2013.01);
Abstract
Methods and system for lifting a substrate are provided. In some embodiments a system includes a processing chamber having a chamber body defining an interior space; and a linear motor comprising: a housing disposed outside of the interior space and sealed to the chamber body, the housing having a cavity in fluid communication with the interior space; and a slider disposed at least partially in the cavity, the slider configured to slide relative to the housing in the cavity.